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Scanning Electron Microscope (SEM)

© Zeiss AG

Scanning Electron Microscopy (SEM) technique produces images and chemical analyses of various surfaces at high resolution. The SEM available at IMPMC is a Zeiss Ultra55 with high-resolution Schottky thermal field emission gun (Schottky SEM-FEG) and fitted with the UHR Gemini® column boosted to enhance the resolution at low voltage, allowing accurate analysis at nanoscale .For more information, please read the following.

Specifications

 

Energy

  • Continuously variable EHT from 100V to 30kV

Resolution

  • 1,1 nm at 20 kV and 2,5 nm at 1 kV

Probe current

  • 4 pA to 20 nA

Detectors

  • Everhart Thornley detector (SE2) for secondary electrons imaging.
  • Angle selective Backscattered detector (AsB) for high energy backscattered electrons imaging.
  • imaging.
  • InLens (SE1) in column detector for High Resolution imaging enhanced for low kV
  • Energy Selective Backscattered in column detector (EsB) for surface backscattered imaging at low kV.
  • Scanning Transmission electron Microscopy detector for BF/DF imaging on thin samples
  • Energy Dispersive Spectroscopy detector (X-EDS) Bruker QUANTAX, 123 eV resolution on Mn, for X elementary analysis (point, linescan and mapping, mosaics) with the possibility to make quantitative with a standard library or semi-quantitative measurements.

Cécile Duflot - 18/02/16

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